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PVD equipment equipped with a double ring magnetron DRM400.
Scia Systems GmbH was established by key staff who developed the software and hard wafers for the IonScan device, an ion beam trimming (trimming processing, IBF) equipment from Roth&Rau AG and MicroSystems GmbH. Scia Systems develops unique and proprietary cutting-edge ion beam and plasma technologies, handling equipment from research and development to mass production.
Single and multi-cathode compatible! Integration with the glove box is also possible.
The "MAGNION, FLARION, EVAD series" are tabletop thin film deposition and plasma devices. The magnetron sputtering PVD device supports single and multi-cathode configurations. The thermal evaporation device is equipped with evaporation boats, small Knudsen cells (K-cells) for organic and inorganic materials, and can also be integrated with a glove box. 【Features】 ■ Magnetron sputtering PVD device: Single and multi-cathode ■ Thermal evaporation device: Evaporation boats, small Knudsen cells (K-cells) for organic and inorganic materials ■ Integration with glove boxes is also possible *For more details, please refer to the PDF materials or feel free to contact us.
